Innovative Coating Solutions

Mbar is currently helping establish new customers for a California-based company that specializes in DLC (diamond-like carbon) and advanced DLN (diamond-like nanocomposite) coatings for protection coatings and for coating electrostatic chucks (ESCs). These coatings are hydrophobic, oleophobic, scratch-resistant, and can be transparent. Properties can be tweaked by simultaneously PVD doping the PECVD process with other chemicals. In the case of DLC coatings on ESCs, these coatings tremendously increase chuck lifetime and reduce particles, can increase the time between refurbishment to years, provide better release, withstand up to 700C, and now cost less than legacy DLC coatings. Mbar is glad to arrange contact.